Publications / Patents

Most Recent (Shanghai Jiaotong University, 2013-2020:

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  1. H. Weng, F. L. Duan(通讯作者), Z. Xie, S. Liu, Z. Ji and Y. Zhang, "LiNbO3-Based SAW Sensors Capable to Measure up to 1100°C High Temperature," in IEEE Sensors Journal, vol. 20, no. 21, pp. 12679-12683, 1 Nov.1, 2020, doi: 10.1109/JSEN.2020.3002861 https://ieeexplore.ieee.org/document/9119455 .
  2. Z. Ji, F. L. Duan(通讯作者) and Z. Xie, "Transient Measurement of Temperature Distribution Using Thin Film Thermocouple Array on Turbine Blade Surface," in IEEE Sensors Journal, https://doi:10.1109/JSEN.2020.3015383  .
  3. Ziyi Xie, Franklin L(通讯作者). Duan, Zhonglin Ji, Lingyi Qian and Zebin Bao, "A New Method of Making Thin-Film Thermocoupes at Sharp Surfaces of Aero-engine Hot Component"
    AIAA Propulsion and Energy 2020 Forum, August 24-28, 2020, VIRTUAL EVENT, https://doi.org/10.2514/6.2020-3511
  4. Franklin L. Duan(通讯作者), Ziyi Xie, and Zhonglin Ji, "Breakthrough of Upper Limit of Temperature Measurement of SAW Sensors for Wireless Passive Sensing inside Propulsion System", AIAA Propulsion and Energy 2020 Forum, August 24-28, 2020, VIRTUAL EVENT, https://doi.org/10.2514/6.2020-3512
  5. Zhonglin Ji, Franklin L. Duan(通讯作者), Zhiliang Hong and Wang Chao, "Thin Film Thermocouple Sensors on CMC Capable of Measuring 1500 °C High Surface Temperatures", August 24-28, 2020AIAA Propulsion and Energy 2020 Forum, VIRTUAL EVENT, https://doi.org/10.2514/6.2020-3510
  6. Franklin L. Duan(通讯作者), Ziyi Xie, Zhonglin Ji, Jibao Li, Zhigang Liu and Binglin Zou, Surface Temperature Test using Wired and Thin Film Thermocouple on NGV's Cooling Performance Evaluation, June 15-19, 2020AIAA AVIATION 2020 FORUM , https://doi.org/10.2514/6.2020-3283 online mp4
  7. Ziyi Xie, Franklin L. Duan(通讯作者), Zhonglin Ji, Siqing Liu, Jie Li and Hongyi Fang, A New Simple Method to Build Thin Film Sensor Array on the Complicated Curved Surface Such As the Turbine Blade, June 15-19, 2020AIAA AVIATION 2020 FORUM, https://doi.org/10.2514/6.2020-3282
  8. Zhonglin Ji, Franklin L. Duan(通讯作者), Haotian Weng, Ziyi Xie, Baowen Zhang, Zhiliang Hong, Chao Wang and Xuyang Xie, A new method to characterize the TBC's thermal barrier effect using single-layer thin film thermocouples, June 15-19, 2020AIAA AVIATION 2020 FORUM, https://doi.org/10.2514/6.2020-3281
  9. Qianhui Liu, Ying Sun, Haibo Guo, Franklin Li Duan, Zhi Yang, Yigang Chen,Influence of α- and β-W phases on performance of SMR devices,Vacuum,Volume 178,2020,109463,ISSN 0042-207X,https://doi.org/10.1016/j.vacuum.2020.109463 .
  10. to download all

  11. Ziyi Xie,Franklin Li Duan (通讯作者),”Material processing for low thermal conductivity for advanced aero-engine applications“,Results in Materials, Volume 6, 2020, 100079, ISSN 2590-048X, https://doi.org/10.1016/j.rinma 
  12. Duan, Franklin Li(通讯作者),  Xie, Ziyi,Ji, Zhonglin & Weng, Haotian."Robust Thin-Film Temperature Sensors Embedded on Nozzle Guide Vane Surface". AIAA Journal. (2020). 1-5. 10.2514/1.J058854.  https://arc.aiaa.org/doi/pdf/10.2514/1.J058854  
  13. Franklin  L. Duan(通讯作者),etc. “Study of Electrical Properties of Thermal Barrier Coating under High Temperatures for Aero-engine Smart Sensors”, AIAA Propulsion and Energy 2019 Forum,19-22 August 2019, Indianapolis, USA, https://arc.aiaa.org/doi/10.2514/6.2019-4087

  14. Haotian Weng,Franklin L. Duan (通讯作者), “High Temperature Wireless Sensing on Aeroengine Turbine Blade Surface”, AIAA Propulsion and Energy 2019 Forum,19-22 August 2019, Indianapolis, USA,  https://arc.aiaa.org/doi/10.2514/6.2019-4085

  15. Ji, Zhonglin,Duan, Franklin Li(通讯作者),“Temperature Distribution Measurements on Turbine Blade Surface by the Aid of Simple Dotted Pt/PtRh Thermal Couple Test Array”, AIAA Propulsion and Energy 2019 Forum,19-22 August 2019, Indianapolis, USA, https://arc.aiaa.org/doi/10.2514/6.2019-4084

  16. H. Weng, F. L. Duan(通讯作者), Y. Zhang and M. Hu, "High Temperature SAW Sensors on LiNbO3 Substrate with SiO2 Passivation Layer," IEEE Sensors Journal, 27 August 2019,   https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8815921

  17. 段力(通讯作者), 姬中林,翁昊天,李继保,林宇震,曹学强,"涡轮导叶片表面MEMS高温测量技术",《航空制造技术》,2020,volume 63, number 5, 62,doi:10.16080/j.issn1671-833x.2020.05.062。 http://manu37.magtech.com.cn/hkzzjs/CN/10.16080/j.issn1671-833x.2020.05.062

  18. 段力 (通讯作者)姬中林,etc,“航空发动机热障涂层导电性能研究”,航空制造技术,2019,  Issue (17): 81-87, http://www.amte.net.cn/CN/10.16080/j.issn1671–833x.2019.17.0812019 http://www.amte.net.cn/CN/volumn/volumn_1315.shtml

  19. Haotian Weng, Franklin Li Duan (通讯作者), Zhonglin Ji, Xi Chen, Zhi Yang, Yafei Zhang, Binglin Zou,
    Electrical insulation improvements of ceramic coating for high temperature sensors embedded on aeroengine turbine blade,Ceramics International,2019,ISSN 0272-8842, https://doi.org/10.1016/j.ceramint.2019.10.078 .(http://www.sciencedirect.com/science/article/pii/S027288421932927X)

  20. 段力 (通讯作者),翁昊天,姬中林,邹兵林,王盈,“精确测量热障涂层温度隔离效能方法探究 – 双层MEMS薄膜热电偶原位集成技术”,《航空发动机》,2019-2020,即将发表。2019,《航空发动机》,精确测量热障涂层温度隔离效能方法探究 – 双层MEMS薄膜热电偶原位集成技术.pdf

  21. 姬中林,段力(通讯作者),翁昊天,谢子仪.“利用原位集成热电偶技术精准测量涡轮叶片表面高温温度的方法探究及误差分析”[J].中国测试,2020,46(01):7-11。 http://kns.cnki.net/    http://www.chinamtt.cn/Periodical/

  22. Franklin Li Duan (通讯作者),  & Yang, Zhi & Ji, Zhonglin & Weng, Haotian & Xie, Ziyi & Shen, Allegro & Mi, Shijie & Chen, Xi & Chen, Yigang & Liu, Qianhui. (2018). Process Optimization and Device Variation of Mg-doped ZnO FBARs. Solid-State Electronics. 151. 10.1016/j.sse.2018.10.015. https://www.sciencedirect.com/science/article/pii/S0038110118302715?via%3Dihub

  23. 陈熙,段力 (通讯作者)等,氧化锌薄膜体声波谐振器制作重复性和均匀性 [J]. 微纳电子技术, 2019(12):984-991.

  24. Duan Franklin Li(通讯作者), Hu M, Zou B, et al. An Easy Way of High-Temperature Monitoring of Turbine Blade Surface for Intelligent Propulsion Systems[C]// Joint Propulsion Conference. 2018.

  25. Franklin L. Duan(通讯作者), Mingkai Hu, Yuzhen Lin, Jibao Li, and Xueqiang Cao. "A New High-Temperature Sensing Device by Making Use of TBC Thermistor for Intelligent Propulsion Systems", 2018 AIAA/IEEE Electric Aircraft Technologies Symposium, AIAA Propulsion and Energy Forum, (AIAA 2018-5015) https://doi.org/10.2514/6.2018-5015

  26. Franklin L. Duan(通讯作者) and Yuzhen Lin. "Development of Accurate and Robust High Temperature Sensor on Aero-engine Turbine Blade Surface", 2018 Joint Propulsion Conference, AIAA Propulsion and Energy Forum, (AIAA 2018-4622). https://doi.org/10.2514/6.2018-4622

  27. Franklin Li Duan(通讯作者), Jibao Li, Junchao Gao, Guifu Ding, and Xueqiang Cao. "Integrated Fabrication of High-Temperature Microelectromechanical System Sensor on Aeroengine Turbine Blade", Journal of Thermophysics and Heat Transfer, Vol. 32, No. 3 (2018), pp. 828-830. https://doi.org/10.2514/1.T5147

  28. Franklin L. Duan(通讯作者). "High Temperature Sensors for Intellegent Aero-Engine Applications", 33rd AIAA Aerodynamic Measurement Technology and Ground Testing Conference, AIAA AVIATION Forum, (AIAA 2017-3239), https://doi.org/10.2514/6.2017-3239

  29. 段力(通讯作者),卢学良,史丽云,王英,付学成,王丹凤,汪军,沈勇,翁昊天,张亚非,氧化锌系列薄膜体声波谐振器的研制和性能表征 [J]. 微纳电子技术, 2016(11):333-339.

  30. 段力(通讯作者), 高均超, 汪瑞军, 胡铭楷, 苏靖超, & 成清清等. (2017). 航空发动机叶片表面热障涂层温度分布的仿真分析.《上海交通大学学报,》51(8), 915-920.

  31. 段力(通讯作者),高均超,丁桂甫,邵靖,毛成龙,沈杰,静波.航空发动机涡轮叶片原位集成高温MEMS 传感器的研制 《航空发动机》,2018,44(4):56-60

  32. Junchao Gao, Franklin Li Duan(通讯作者), Chang Yu, Wentao Meng, Lizuo Liu, Guifu Ding, Congchun Zhang, Ying Wang, Electrical insulation of ceramic thin film on metallic aero-engine blade for high temperature sensor applications, Ceramics International, Volume 42, Issue 16, December 2016, Pages 19269-19275, ISSN 0272-8842, http://dx.doi.org/10.1016/j.ceramint.2016.09.093.

  33. Mingkai Hu, Franklin Li Duan(通讯作者), Design, fabrication and characterization of SAW devices on LiNbO3 bulk and ZnO thin film substrates, Solid-State Electronics, Volume 150, 2018, Pages 28-34, ISSN 0038-1101, https://doi.org/10.1016/j.sse.2018.08.005. (http://www.sciencedirect.com/science/article/pii/S0038110118300509) Keywords: SAW device; Surface acoustic wave; Wireless sensor; RF resonator; Temperature sensor

  34. Yijian Liu, Zhongli Li, Zhi Yang, Yanjie Su, Yaozhong Zhang, Huey-liang Hwang, Franklin Duan(通讯作者), Yafei Zhang*. Novel design and performance of the solidly mounted resonator with an AlN-buffered ZnO piezoelectric film [J]. Vacuum, 154 (2018) 11-17.

  35. [4]. Jin S, Li Duan(通讯作者), Qiang W, et al. Fabrication and High Temperature Characterization by MEMS Embedded Sensor[J]. Chinese Journal of Sensors & Actuators, 2017, 30(9):1352-1358.

  36. [5]. 李磊, 段力(通讯作者), 秦格华, 马德川, 王云生, & 陶闻钟等. (2017). 应用于航空发动机涡轮叶片的热障涂层材料研究.《功能材料》48 (2), 2084-2090.

  37. [6]. 邵靖, 段力(通讯作者), 胡铭楷, 丁桂甫, 毛成龙, & 沈杰等. (2018). Mems原位集成传感器振动冲击试验研究.《振动.测试与诊断》(3).

  38. [7]. 胡铭楷 翁昊天 刘骏尘 付学成 史丽云 丁桂甫 张亚非 段力*. 设计和工艺参数对声表面波器件性能的影响 《微纳电子技术》, 2017, 54(11):752-759.

  39. [8]. 高均超,段力(通讯作者),王英,刘明,王凤 丹,丁桂甫,汪红,程萍,吴凯峰,王强,郑芳芳,邵靖,谢开成,PDMS软质模板制备与叶片曲表面图形转移工艺,微纳电子科技,2016.5

  40. [9]. 陈翰, 段力(通讯作者), 丁丽华. 一种提高流片效率的亚分辨率辅助图形OPC方法[J]. 2016.

  41. [10]. 陈权, 段力(通讯作者), 毛智彪. 亚分辨率辅助图形对28纳米密集线条光刻成像的影响[J]. 中国集成电路, 2016, 25(5).

  42. [11]. 许贻梅, 段力(通讯作者), & 钱文生. (2017). 基于0.18μm cmos工艺实现无epi新型ldmos器件. 《集成电路应用,》34(4), 62-67.

  43. [12]. 曹琛 段力(通讯作者),《0.11~0.18um 半导体制造IMD 气泡解决方案》. 集成电路应用,第35卷第12期(总第303期),2018年12月。

  44. [13]. 邵靖, 段力(通讯作者),王强, et al. MEMS高温温度传感器的研制与测量精度研究[J]. 传感技术学报, 2017(09):52-58.

  45. [1]. Yijian Liu, Yong Shen, Franklin Duan, Yaozhong Zhang, Zhongli Li, Huey-liang, Hwang, Yafei Zhang, Solidly mounted resonators fabricated for GHz frequency applications based on MgxZn1-xO piezoelectric film, Vacuum, Volume 141, 2017, Pages 254-258, ISSN 0042-207X, https://doi.org/10.1016/j.vacuum.2017.04.012.

  46. [2]. J. Han, P. Cheng, H. Wang, C. C. Zhang, J. B. Zhang, Y. Wang, L. Duan and G. F. Ding, “MEMS-based Pt film temperature sensor on alumina substrate”, J. Materials. Letters, 125(2014) 224-226.

  47. [3]. Liu Y, Shen Y, Duan F, et al. Solidly mounted resonators fabricated for GHz frequency applications based on Mg x Zn 1-x O piezoelectric film[J]. Vacuum, 2017, 141.

  48. [4]. Yafei Zhang, Li Franklin Duan, Yaozhong Zhang, Jian Wang, Huijuan Geng, Qing Zhang, Advances in Conceptual Electronic Nanodevices based on 0D and 1D Nanomaterials, Nano-Micro Letters 2014, 6, 1–19.

  49. [5]. 李洪美, 孙云娜, 段力, 王艳, 丁桂甫, 张久斌, 牛迪,高温复合多层膜结构传感器的热机械可靠性 ,《仪表技术与传感器》 2015年11期

  50. [6]. 沈勇, 刘一剑, 杨翰林, 段力, & 张亚非. (2014). Mg_xzn_(1-x)o压电薄膜表面粗糙度对smr性能的影响. 微纳电子技术(12), 776-779..
     


Old(Silicon Valley, LSI and AMD):

²  Franklin Duan, Stephen Cooper, Amit Marathe, John Zhang, Sankaran Kartik Jayanarayanan. "Impact of Monitoring Voltage on the Lifetime Extrapolation During the Accelerated Degradation Tests", IIRW2006.

²  F. Duan, R. Castagnetti, R. Venkatraman, O. Kobozeva, and S. Ramesh, LSI Logic Corporation, "Design and Use of Memory-Specific Test Structures to Ensure SRAM Yield and Manufacturability", ISQED'2003, pp119-124, 2003

²  Chuanzhao Yu, J. Zhang, J. S. Yuan, F. Duan, S. K. Jayanarananan, A. Marathe, S. Cooper, V. Pham, and J.-S. Goo, I, "Evaluation of RF Capacitance Extraction for Ultrathin Ultraleaky SOI MOS Devices", EEE ELECTRON DEVICE LETTERS, VOL. 28, NO. 1, JANUARY 2007

²  W. Kong, R.Venkatraman, R. Castagnetti, F. Duan and S. Ramesh, "High-Density and High-Performance 6T-SRAM for System-on-Chip in 130 nm CMOS Technology", VLSI Symposium, 2001.

²  Puchner, H.; Liu, Y.-C.; Kong, W.; Duan, F.; Castagnetti, R.; , "N-Well Engineering to Improve Soft-Error-Rate Immunity for P-Type Substrate SRAM Technologies," Solid-State Device Research Conference, 2001. Proceeding of the 31st European , vol., no., pp. 295- 298, 11-13 September 2001,

²  Venkatraman, R.; Castagnetti, R.; Kobozeva, O.; Duan, F.L.; Kamath, A.; Sabbagh, S.T.; Vilchis-Cruz, M.A.; Liaw, J.J.; Jyh-Cheng You; Ramesh, S.; , "The design, analysis, and development of highly manufacturable 6-T SRAM bitcells for SoC applications," Electron Devices, IEEE Transactions on , vol.52, no.2, pp. 218- 226, Feb. 2005.

²  Olga Kobozeva, Ramnath Venkatraman, Ruggero Castagnetti, Franklin Duan, Arvind Kamath and Shiva Ramesh, "Designing high-performance cost-efficient embedded SRAM in deep-submicron era", Proc. SPIE 5379, 241 (2004);

²   

Previous (Ph. D Period)

²  Duan, F.L.; Ioannou, D.E.; Jenkins, W.C.; Hughes, H.L.; Liu, M.S.T.; , "Channel coupling imposed tradeoffs on hot carrier degradation and single transistor latch-up in SOI MOSFETs," Reliability Physics Symposium Proceedings, 1998. 36th Annual. 1998 IEEE International , vol., no., pp.194-202, March 31 1998-April 2 1998,

²  Ioannou, D.E.; Duan, F.L.; Sinha, S.P.; Zaleski, A.; , "Opposite-channel-based injection of hot-carriers in SOI MOSFET's: physics and applications," Electron Devices, IEEE Transactions on , vol.45, no.5, pp.1147-1154, May 1998

²  Ioannou, D.E.; Duan, F.L.; Jenkins, W.C.; Hughes, H.L.; , "Channel Coupling and Edge Effect Imposed Trade-offs on Fully-Depleted (FD) SOI MOSFET's," Solid-State Device Research Conference, 1998. Proceeding of the 28th European , vol., no., pp.616-619, 8-10 Sept. 1998,

²  Dimitris E. Ioannou, Franklin L. Duan, Williams C. Jenkins, and Harold L. Hughes, “Channel Coupling Imposed Tradeoffs on Fully-Depleted (FD) SOI MOSFET’s”, ESSDREC’98.

²  Franklin L. Duan, Dimitris E. Ioannou, Shankar P. Sinha, and Frederick T. Brady,  “LDD Design Tradeoffs for Self Latch-Up and Hot Carrier Degradation Control in Accumulation Mode FD SOI MOSFET’s”, IEEE Transactions on Electron Devices, vol. 44, pp.972-977, 1997.

²  F.L. Duan, X.Zhao, D.E. Ioannou, H.L. Hughes and S.T. Liu, “Detrimental Edge Effects on the Floating Body Phenomena in SOI MOSFETs”, Symposium of 192nd International Meeting of the Electrochemical Society, Inc., pp.239-245, 1997.

²  Franklin L. Duan and Dimitris E. Ioannou, “Design and Analysis of a Novel Mixed Accumulation/Inversion Mode FD SOI MOSFET”, 1997 IEEE International SOI Conference Proceedings, pp.100-101, 1997.

²  D.E. Ioannou, F.L. Duan, and X. Zhao, “SIMOX Substrate and MOSFET’s for Enhanced Reliability and Performance”, 1997 International Semiconductor Device Research Symposium, pp.627-630, 1997.

²  X. Zhao, F.L. Duan, A. Thanailakis, D.E. Ioannou, R.K. Lawrence, and H.L. Hughes, “Hole Trap Investigation in Supplemental Oxygen SIMOX Wafers by Opposite Channel Based Charge Injection”, 1997 IEEE International SOI Conference Proceedings, pp.116-117, 1997.

²  Shankar P. Sinha, Franklin L. Duan, Dimitris E. Ioannou, William C. Jenkins, and Harold L. Hughes, “Time Dependence Power Laws of Hot Carrier Degradation in SOI MOSFET’s”, 1996 IEEE International SOI Conference Proceedings, pp.18-19, 1996.

S. P. Sinha, F.L. Duan, D.E. Ioannou, William C. Jenkins, Harold L. Hughes, and M.S. Liu, “Hot Carrier Degradation of Fully Depleted SIMOX MOSFET’s”, Proceedings of the 7th International Symposium On Silicon-On-Insulator Technology and Devices, pp.324-329, 1996.

P a t e n t s 专利

²  Reduced soft error rate (SER) construction for integrated circuit structures, 2002

²  Single channel four transistor SRAM, 2002

²  A new method to detect random and systematic transistor degradation for transistor reliability evaluation in high-density memory – 2003

²  Method and apparatus for characterizing shared contacts in high-density SRAM cell design – 2003

²  New methodology to measure many more transistors on the same test area – 2007

 

 

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Electrical insulation of ceramic thin film on metallic aero-engine blade for high temperature sensor applications

J Gao, FL DuanC Yu, W Meng, L Liu, G Ding… - Ceramics …, 2016 - Elsevier

Fabricating sensor devices directly on metallic component requires the use of an electrical 
insulating ceramic layer between the sensor and the metal. However, most ceramics lose 
their electrical insulation with the increasing temperature. In this paper, electrical insulation …

  被引用次数:5 相关文章 所有 4 个版本

Design, fabrication and characterization of SAW devices on LiNbO3 bulk and ZnO thin film substrates

M Hu, FL Duan - Solid-State Electronics, 2018 - Elsevier

In this paper, surface acoustic wave (SAW) devices with various designs were fabricated on 
two types of piezoelectric substrates of LiNbO 3 bulk material and thin piezoelectric ZnO film 
on silicon. Different sizes, orientation and types of SAW devices were laid out on the same …

  被引用次数:3 相关文章 所有 2 个版本

[PDF] springer.com

Advances in conceptual electronic nanodevices based on 0D and 1D nanomaterials

Y Zhang, LF Duan, Y Zhang, J Wang, H Geng… - Nano-Micro Letters, 2014 - Springer

Nanoelectronic devices are being extensively developed in these years with a large variety 
of potential applications. In this article, some recent developments in nanoelectronic 
devices, including their principles, structures and potential applications are reviewed. As …

  被引用次数:15 关文章 所有 20 个版本

[PDF] uci.edu

Integrated Fabrication of High-Temperature Microelectromechanical System Sensor on Aeroengine Turbine Blade

FL Duan, J Li, J Gao, G Ding, X Cao - Journal of Thermophysics and …, 2018 - arc.aiaa.org

INTELLIGENT aeroengines need traditional resistance temper-ature detector (RTD) new 
sensor technology for various in situ measurements on temperature, stress, pressure, heat 
flow, etc. an intelligent engine is one of the key programs in the Versatile Affordable …

  相关文章 所有 2 个版本

[PDF] km2000.us

[PDF] Study of Electrical Insulation of Thermal Barrier Coating under High Temperatures for Aero-engine Smart Sensors

FL Duan, H Weng, Z Ji, J Li, B Zou - 2019 - km2000.us

Traditionally most research efforts on thermal barrier coating (TBC) for aviation engine were 
focusing on its thermal insulation and reliability, yet little on its electrical behaviors especially 
under elevated temperatures. Due to the need to build smart sensors on the turbine blade …

  相关文章 

A New High-Temperature Sensing Device by Making Use of TBC Thermistor for Intelligent Propulsion Systems

FL Duan, H Weng, Z Ji, M Hu, X Cao… - 2018 AIAA/IEEE …, 2018 - ieeexplore.ieee.org

Thermal barrier coating (TBC) is an important material for aero-engine as a good thermal 
and electrical insulator. However this ceramic layer becomes electrically conductive at 
elevated temperatures above 600° C. By making use of its thermal resistance sensitivity to …

  相关文章 所有 2 个版本

[PDF] km2000.us

[PDF] Development of Robust High Temperature MEMS Sensor on Aero-engine Turbine Blade Surface

FL Duan, M Hu, G Ding, J Li, Y Lin, B Zou - 2018 - km2000.us

Robust embedded MEMS sensors capable of measuring high temperature in aero-engine 
combustion environment plays an important role in developing more efficient and intelligent 
aero-engine. In this paper, thermistor and thermal couple devices were in-situ fabricated …

  相关文章 

High Temperature SAW Sensors on LiNbO3 Substrate With SiO2 Passivation Layer

H Weng, FL Duan, Y Zhang, M Hu - IEEE Sensors Journal, 2019 - ieeexplore.ieee.org

The surface acoustic wave (SAW) device can be used to measure temperature wirelessly, 
which is highly adaptable to the use in aero-engines high-temperature test scenarios where 
wired-sensors is not suitable for its difficulty in signal transfers. Herein, this paper presents a …

  相关文章

Electrical insulation improvements of ceramic coating for high temperature sensors embedded on aeroengine turbine blade

H Weng, FL Duan, Z Ji, X Chen, Z Yang, Y Zhang… - Ceramics …, 2020 - Elsevier

Intelligent aeroengine requires high temperature sensors, especially MEMS thin film sensors 
directly fabricated on the surface of turbine blade. For this purpose, an electrical insulation 
layer is needed on blade substrate metals. However, the electrical insulation of ceramic …

  相关文章

Process optimization and device variation of Mg-doped ZnO FBARs

FL Duan, Z Yang, Z Ji, H Weng, Z Xie, A Shen, S Mi… - Solid-State …, 2019 - Elsevier

Thin film bulk acoustic resonator (FBAR) plays a very important role in radio frequency (RF) 
filters used in cell phone and other wireless systems. Although FBAR is commercialized, the 
design/process interactions on the frequency response variation in FBAR device are still …

  相关文章 所有 5 个版本

[PDF] northwestern.edu

Temperature Distribution Measurements on Turbine Blade Surface by the Aid of Simple Dotted Pt/PtRh Thermal Couple Test Array

Z Ji, H Weng, M Hu, FL Duan, J Li - AIAA Propulsion and Energy 2019 …, 2019 - arc.aiaa.org

Smart sensors are necessary to measure the surface temperature of the key aero-engine 
components such as nozzle guide vane–one of the key parts receiving the highest heat after 
the gas combustion. Traditional sensors such as wired thermocouple (TC) are cumbersome …

  相关文章 所有 2 个版本

High Temperature Sensors for Intellegent Aero-Engine Applications

FL Duan - 33rd AIAA Aerodynamic Measurement Technology and …, 2017 - arc.aiaa.org

Intelligent aero-engine is one of the three key projects in VAATE program. Embedded 
advanced sensors onto the key components such as turbine blade are highly necessary for 
those internet+ applications on intelligent aero-engine endeavors. In this paper, the Pt thin …

  被引用次数:4 关文章

Solidly mounted resonators fabricated for GHz frequency applications based on MgxZn1-xO piezoelectric film

Y Liu, Y Shen, F DuanY Zhang, Z Li, H Hwang… - Vacuum, 2017 - Elsevier

Solidly mounted resonator is a type of film bulk acoustic resonator for microwave operation 
applications. ZnO piezoelectric films provide a choice to produce solidly mounted resonator, 
but show a low longitudinal acoustic velocity and a relatively low response. In this work, a …

  被引用次数:3 相关文章 所有 4 个版本

[HTML] acs.org

An Easy Way of High-Temperature Monitoring of Turbine Blade Surface for Intelligent Propulsion Systems

FL Duan, M Hu, B Zou, J Li - 2018 Joint Propulsion Conference, 2018 - arc.aiaa.org

State-of-art integrated smart sensors are necessary for more efficient aero-engine 
development and health monitoring purpose. A simple and economic method to measure 
the temperature of aero-engine component by thermal resistance of thermal barrier coating …

  被引用次数:1 相关文章

Novel design and performance of the solidly mounted resonator with an AlN-buffered ZnO piezoelectric film

Y Liu, Z Li, Z Yang, Y Su, Y Zhang, H Hwang, F Duan… - Vacuum, 2018 - Elsevier

In this report, an AlN-buffered ZnO double-layer piezoelectric layer based SMR (solidly 
mounted resonator) was designed and fabricated, in which the nano AlN film acted as a 
buffer layer. For optimization of the piezoelectric layer, a series of SMRs were fabricated with …

  被引用次数:2 相关文章 所有 3 个版本

Process optimization and device variation of Mg-doped ZnO FBARs

FL Duan, Z Yang, Z Ji, H Weng, Z Xie, A Shen, S Mi… - Solid-State …, 2019 - Elsevier

Thin film bulk acoustic resonator (FBAR) plays a very important role in radio frequency (RF) 
filters used in cell phone and other wireless systems. Although FBAR is commercialized, the 
design/process interactions on the frequency response variation in FBAR device are still …

  相关文章 所有 5 个版本

[PDF] northwestern.edu

Temperature Distribution Measurements on Turbine Blade Surface by the Aid of Simple Dotted Pt/PtRh Thermal Couple Test Array

Z Ji, H Weng, M Hu, FL Duan, J Li - AIAA Propulsion and Energy 2019 …, 2019 - arc.aiaa.org

Smart sensors are necessary to measure the surface temperature of the key aero-engine 
components such as nozzle guide vane–one of the key parts receiving the highest heat after 
the gas combustion. Traditional sensors such as wired thermocouple (TC) are cumbersome …

  相关文章 所有 2 个版本

High Temperature Sensors for Intellegent Aero-Engine Applications

FL Duan - 33rd AIAA Aerodynamic Measurement Technology and …, 2017 - arc.aiaa.org

Intelligent aero-engine is one of the three key projects in VAATE program. Embedded 
advanced sensors onto the key components such as turbine blade are highly necessary for 
those internet+ applications on intelligent aero-engine endeavors. In this paper, the Pt thin …

  被引用次数:4 相关文章

Solidly mounted resonators fabricated for GHz frequency applications based on MgxZn1-xO piezoelectric film

Y Liu, Y Shen, F DuanY Zhang, Z Li, H Hwang… - Vacuum, 2017 - Elsevier

Solidly mounted resonator is a type of film bulk acoustic resonator for microwave operation 
applications. ZnO piezoelectric films provide a choice to produce solidly mounted resonator, 
but show a low longitudinal acoustic velocity and a relatively low response. In this work, a …

  被引用次数:3 相关文章 所有 4 个版本

[HTML] acs.org

An Easy Way of High-Temperature Monitoring of Turbine Blade Surface for Intelligent Propulsion Systems

FL Duan, M Hu, B Zou, J Li - 2018 Joint Propulsion Conference, 2018 - arc.aiaa.org

State-of-art integrated smart sensors are necessary for more efficient aero-engine 
development and health monitoring purpose. A simple and economic method to measure 
the temperature of aero-engine component by thermal resistance of thermal barrier coating …

  被引用次数:1 相关文章

Novel design and performance of the solidly mounted resonator with an AlN-buffered ZnO piezoelectric film

Y Liu, Z Li, Z Yang, Y Su, Y Zhang, H Hwang, F Duan… - Vacuum, 2018 - Elsevier

In this report, an AlN-buffered ZnO double-layer piezoelectric layer based SMR (solidly 
mounted resonator) was designed and fabricated, in which the nano AlN film acted as a 
buffer layer. For optimization of the piezoelectric layer, a series of SMRs were fabricated with …

  被引用次数:2 相关文章 所有 3 个版本